Semiconductor & Solar >> SPTS Technologies

Molecular Vapor Deposition (MVD®) Systems

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    SPTS Technologies, a KLA company, designs, manufactures, sells, and supports Etch, PVD, CVD and MVD capital equipment, providing advanced wafer processing technologies and solutions for the semiconductor and microelectronics industry. End-market applications include micro-electromechanical systems (MEMS), advanced packaging, LED, high speed RF device IC’s and power semiconductors.

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      MVD® replaces traditional liquid coating processes with a highly reproducible vapor deposition alternative that is ideal for manufacturing applications.
      Typical MEMS devices benefiting from MVD® hydrophobic anti-stiction films include displays, sensors, actuators, RF switches, inkjets, and data storage devices. BioMEMS applications include wetting control in micro-fluidics (lab-on-a-chip, microplates), passivation on implantable devices, requiring biocompatible surface coatings, and devices requiring functionalized surface coatings.
      MVD® is also used for commercial applications requiring moisture barriers, anti-corrosion coatings, or release layers for imprinting.