Green LED Exposure Units

For Inner/Outer Layer Dry film
-High Resolution L/S 62.5μm/62.5μm
-Alignment Precision 3σ≤ 20μm
-High Throughput 900~1000panels/pre-shift(12Hrs)
-Multiple Wavelength collimated UV-LED
-8 Individual-axis camera
-Servo Transfer for Daul Trays
-Patented Illumination system for target recognition
-LED Light Instant ON/OFF, Reduce Engergy Costs.(Lift time better than Mercury UV-LAMP)
-LED Module Status Monitoring
-Glass no fitting design

Item Specification
Exposure: Double side, Double tray
Light: Multiple Wavelength UV-LED
Throughput: 2~2.5 panels/min
Panel size: 254mm×305mm~534mm×610mm(Standard)/610×712mm(Increase)
Interface: Chinese/English + Touch Screen
Thickness: 0.1mm~3.2mm
Warp and Twist: Max 5mm
Artwork size: 610mmX660mm(Standard) /660×762mm(Increase)
Resist: Dry film
Energy: 23mw/cm²,(Standard) ; 18mw/cm²,(Increase)
Alignment Precision: 3σ ≤ 20μm
Number of cameras: 4
Collimation: θc/2 < 1.5˚
Declination: θd < 3˚
X-Y-Movement of cameras: Automatically
Window of the camera: 5mm×4.6mm
Pre-Registration: pin hole, ψ125mil
Control Industrial: PC + Windows
Clean room: Class 10,000
Uniformity: 534×610mm(Standard) >85%;610×712mm(Increase),＞80%
Resolution line/space: 62.5μm/62.5μm ; 50μm/50μm
Fixing of artwork: By vacuum no tape
Frame sealing: Air pressure seal rubber
Glass: Tempered glass
Chamber vacuum: Adjustable between 0~500mm Hg
Vacuum control: Time delay settable
Panel exposure:: Spacer necessary
Length/Width/High: 3100mm/1370mm/2334mm
Length/Width/High: 760mm/1020mm/1800mm(708mm/738mm/955mm,option chiller)
Cooling Water: 2.5~3Kg/cm²,15°C or 30°C under,60L/min,1”pipe
Electrical: 220V/380V60/50Hz,3φ4W,8.5KVA+7.5KVA(chiller)
Air Source Flow: 150~200L/min,φ12mm,5.5kg/cm²