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Features:
Combined C-V, I-V and four point probe mapping system
all features of M4PP3093 and CVmap 3093 A/B combined
Suited for the characterization of USJ
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Detailed Specs
Features of M4PP3093:
Desktop system with computer control
Up to 300 mm (12″”) capability
6 mm edge exclusion
Features for CVmap 3093 A/B
same basic features as CVmap 92 A/B
up to 300 mm (12″”) capability
Desktop system
Drawer for receiving the wafer
CVmap software