Semiconductor & Solar >> Kleindiek Nanotechnik GmbH

Atomic Force Microscope

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    Atomic Force Microscope measures the roughness of a sample surface at a high resolution, and performs microfabrication of a sample. Also provides 3D information from simultaneous Scanning Electron Microscopy and AFM pictures.

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      The SuperFlat AFM combines the power of SEM and AFM. Information on lateral dimensions and material from in-situ inspection can be complemented by precise AFM topographical and frictional information. The tool is flat and compact enough to fit through the majority of SEM load-locks, allowing ease of use and increasing throughput. In addition, its size offers enormous stability and vibration dampening advantages, which are particularly attractive when using the tool ex-situ.
      Compatible with most of the Scanning Electron Microscopes and FIBs available in the market such as,
      Carl Zeiss, FEI, Tescan, Jeol, Hitachi, Olympus, etc.